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Contact usPAPER DOI: 10.1109/IRPS48228.2024.10529367
technical paper
Statistical characterization of off-state stress degradation in planar HKMG nFETs using device arrays
keywords:
nfets
off-state stress
hkmg
transistor array
We benefit from the statistical characterization of Off-State Stress (OSS) on nanoscale devices to better understand the competing charge trapping effects. We show that OSS in such devices manifests a turn-around behaviour caused by the competition of hole injection into oxide defects, which dominates for shorter times, and interface state generation, which gains relevance for longer times. For this, we analyze the evolution of different parameters (Vth, Isub, gm) along time at different stress conditions.