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PAPER DOI: 10.1109/IRPS48228.2024.10529367

technical paper

IRPS 2024 Main Conference

April 18, 2024

Dallas, United States

Statistical characterization of off-state stress degradation in planar HKMG nFETs using device arrays

keywords:

nfets

off-state stress

hkmg

transistor array

We benefit from the statistical characterization of Off-State Stress (OSS) on nanoscale devices to better understand the competing charge trapping effects. We show that OSS in such devices manifests a turn-around behaviour caused by the competition of hole injection into oxide defects, which dominates for shorter times, and interface state generation, which gains relevance for longer times. For this, we analyze the evolution of different parameters (Vth, Isub, gm) along time at different stress conditions.

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