United States

This paper presents thermal-neutron soft error rates (tnSER) in 7 nm bulk-FinFET technology with applied Cobalt (Co) contact. A thermal-neutron irradiation test at MURR shows tnSER reduction in the 7 nm: the tnSER in the 7 nm (Co-contact) is 0.0012X of the tnSER in 14 nm (Tungsten (W)-contact). Simulation analysis shows that tnSER changed by 0.21X due to the advancement of transistor technology (from 14nm to 7nm) and 0.0057X due to the change in contact-material (from W to Co).




IRPS 2022

Thermal-Neutron SER Mitigation by Cobalt-Contact in 7 nm Bulk-FinFET Technology

7 nm

thermal neutron

soft error

cobalt

contact

finfet

technical paper

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Thermal-Neutron SER Mitigation by Cobalt-Contact in 7 nm Bulk-FinFET Technology

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Universal Hot Carrier Degradation Model under DC and AC Stress

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