United States

We describe a closed-loop method for patterning liquid samples using Dip-Pen Nanolithography. The proposed work addresses a pervasive issue in scanning probe lithography, namely real-time closed-loop control over patterning, and scanning probe lithography of liquids as a candidate for the robust nanoscale manipulation of liquids for advanced high throughput chemistry.

EIPBN 2021

Closed-Loop Nanopatterning of Liquids with Dip-Pen Nanolithography

nanopatterning

closed-loop

dip-pen nanolithography

scanning probe lithography

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INTERMAG 2021

technical paper

The International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), affectionately known as "3-Beams," is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging technologies; and their applications in a broad spectrum of fields. In its 64th meeting, researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent and future trends in these technologies.
 
 
 
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CMOS back-end-of-line integration is a very promising technology for the next generations of integrated circuits. Yet, electron beam lithography and alignment on multiple underlying metal layers and structures is challenging. In this paper, we present an image correlation strategy, procedure and markers to reach alignment accuracy better than 5 nm.

Comparison of alignment markers and method for electron-beam lithography on CMOS dies

Using high current focused Xe ion beam milling we fabricated ultra-deep and high quality micro-axicons in such a challenging material for microfabrication as lithium niobate. The axicons generate sub-wavelength focused beam over extended depths of focus with potential applications in microscopy and particle trapping.

Ultra-deep micro-axicons in lithium niobate by focused Xe ion beam milling

Our goal in this paper is to demonstrate a process flow for the fabrication of silicon tips using KOH based wet etching and Cryo or Bosch based dry etching approaches.

Fabrication of Silicon Micro Tips for Microbial Cell Lysis Applications

We have developed a new technology for detecting single DNA molecules on-chip. A nanofluidic device was fabricated in a multi-step process to unfold the molecules in 3D inlets and guide them inside the nanochannels. No external field is applied, allowing high throughput and generate enormous data in real-time.

High Throughput DNA Optical Mapping in Real-Time on 3D Nanofluidic Devices

Blood separation and processing is a vital and essential step in numerous medical and clinical tests. We present here a unique deformable nanodevice functionalized by three-dimensional (3D) microbeads for plasma separation and blood cells retrieval.

Deformable Microbeads-stacked Nanodevice for Blood Plasma Separation and Blood Cells Retrieval

Label-free optical observation of transparent nano-objects is challenging. We present PlAsmonic NanO-apeRture lAbel-free iMAging (PANORAMA) to image, size, count and monitor single nanoparticle with a size limit approaching sub-10 nm. Molecular imaging is envisioned with functionalized substrates for single nanoparticle analysis for extracellular vesicles (e.g., exosomes) and pathogens (e.g., viruses).

A new label-free plasmonic imaging technique for quantitative analysis of transparent nanoscale objects approaching molecular size

We develop a broadband and omnidirectional tunable resonators with polarization-free high light absorption by preparing a hexagonally patterned array of free-standing SiO2_Ag core-shell nanoparticles. It is the result of hybrid optical modes consisting of Plasmon modes and whispering gallery modes.

Omnidirectional and band-tunable light absorption in free-standing dielectric-metal core-shell resonator arrays

We present optically resonant bipartite metal nano-cylinder arrays fabricated using electron beam lithography. The arrays utilise two different structure sizes with diameter differences as small as 10 nm. We show that this can be achieved and that the arrays show a resonance response that agrees with electromagnetic simulations.

The Fabrication of Bipartite Plasmonic Arrays for Lasing Applications

We demonstrated a technology to experimentally investigate plasmon enhanced fluorescence at the sub-nanometer scale, where strong fluorescence quenching occurs. We have experimentally identified optimal gap sizes for maximum plasmon enhanced fluorescence with tunable dielectric spacers.

Probing the Mechanisms of Strong Fluorescence Enhancement in Plasmonic Nanogaps with Subnanometer Precision

The fabrication of large area silver nano-gratings has been reported using optical interference lithography. The coupling of these plasmonic resonators with optically active quantum dots indicates significant enhancement in photoluminescence signal. Furthermore, The coupling with WS2 monolayers and MoS2/WS2 hetro-bilayers to enhance photocatalytic hydrogen conversion will also be discussed.

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