United States

We demonstrate a novel fabrication process for creating ultra-thin (5+ nm) suspended membranes from a variety of ALD materials. ALD films as thin as 5 nm have been released without damage using a low-power O2 plasma. This flexible process is currently being validated through fabrication of conductive TiN TEM windows.

EIPBN 2021

Fabrication of Ultra-Thin Suspended ALD Membranes

transmission electron microscopy

mems

suspended membranes

electron-transparent windows

ultra-thin membranes

atomic layer deposition

The International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), affectionately known as "3-Beams," is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging technologies; and their applications in a broad spectrum of fields. In its 64th meeting, researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent and future trends in these technologies.
 
 
 
[![](https://assets.underline.io/uploads/markdown_image/1/image/4bdf4450aa93073cd684b096b403df2e.png)](https://drive.google.com/file/d/1CPaA3-Yf7_maBxJMUJaUORLF3HGO9CIe/view?usp=sharing) [![](https://assets.underline.io/uploads/markdown_image/1/image/cea8a407085dee5422a2c16738ce27ca.png)](https://eipbn.org/abstracts/2021/)

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technical paper

In this work, we apply multilayer etching mask and optimize the etch process to improve etching rate and etching selectivity to pattern sapphire antireflection nanostructures. Initial results show 2-D sapphire nanostructures with 530 nm width and 470 nm height, resulting in two-fold aspect ratio enhancement over previous work.

Plasma Etching of High Aspect ratio Sapphire Antireflection Nanostructures Using Multilayer Etching Mask

Plasmonic biosensors have been attracted growing attentions in recent years because of their unique properties of high sensitivity, label-free operation, and suitable for high-throughput real-time detection. Here, we proposed a facile, use-friendly and cost-effective image-based plasmonic biosensor to detect the concentration of various biomolecule.

Nanotransfer printing of plasmonic nanostructures on convex lens for highly sensitive image-based biosensing

Optical metasurfaces have emerged as potential candidates for next generation optical devices due to their ability to manipulate the amplitude, phase, wavenumber, and polarization of light1. They are two dimensional subwavelength structures which are engineered to abruptly impart a desired property shift to the impinging optical wavefront. Huygens metasurfaces comprise of an array of optical resonators where each resonator acts as a point source causing light to propagate in the forward direction. In our work, these metasurfaces are made using vanadium dioxide, which was chosen as a good candidate because it exhibits a reversible metal-insulator transition above 68oC. Vanadium dioxide is known for its thermochromic property, making it a promising material for smart energy-saving windows2. In this report, we present a bottom-up fabrication process for vanadium dioxide metasurfaces useful for optical modulation at short wave infrared wavelengths (SWIR). Thin films of vanadium dioxide are fabricated using pulsed laser ablation of a vanadium pentoxide target on a quartz substrate. This is done using a KrF excimer laser while flowing oxygen gas into the vacuum chamber during ablation. Electron-sensitive resist (PMMA) is spun on the film and functions as a stencil for patterning using electron beam lithography. Different hard masks have been used to achieve etched features that closely match geometries designed using finite element analysis for specific behaviors. We present results of fabricated nanoantennas using fluorine- and chlorine-based etch processes. We propose that chlorine-based etch recipes are preferred in order to achieve good anisotropy and accurate nanoscale dimensions for optical device applications.

Fabrication of Dynamically Tunable Vanadium Dioxide Huygens Metasurfaces for Optical Modulation

Electrochemical methods have stood out as the most promising since they can detect liquid-phase explosives. Moreover, they are simple, inexpensive, suitable for portable sensors, work at ambient conditions, and have high sensitivity and selectivity for nitro-compound.

Amperometric detection of nitro compounds using novel nanomaterial composite

In this work, a geometric model was developed using line-by-line assembly of non-monodispersed binary nanoparticles to obtain a randomly closed packed assembly structure. To validate the results from the script, a binary nanoparticle assembly was experimentally fabricated. The experimental and simulated FFT peak frequencies were compare.

Modeling Co-Assembly of Binary Non-Monodispersed Nanospheres

This talk will review applications of the Cs+ Low Temperature Ion Source (LoTIS). This ion source enables high precision FIB imaging and machining, and also high-yield secondary ion mass spectrometry (SIMS)

Applications of the Cesium Low Temperature Ion Source

After an introduction to the npSCOPE instrument and its capabilities we will introduce the new STIM detector and present first results obtained with it on single and polycrystalline samples as well biological specimen. The latter will focus on different kinds of nanoparticle samples relevant in the field of nano-toxicology.

 Scanning Transmission Ion Micrsocopy in the Helium Ion Microscope for nanoparticle research

Electrostatic lens system optimization is a challenge, especially for systems having many free variables with more than one objective function. An example is minimization of probe size for a primary beam, with in-lens secondary electron detection with maximum detection efficiency. This subject has been investigated here using Multi-Objective GA.

Probe Size and Detection Efficiency Optimization in Electrostatic Lens Systems Using Multi-Objective Genetic Algorithms

We describe two accessible and successful microfluidic strategies to expose human pluripotent stem cells to spatial gradients of differentiation-inducing extracellular signals in vitro. In addition, coupling with a fluorescent reporter and live-cell imaging allowed us to characterize the spatiotemporal dynamics of differentiation of our spatially patterned cell colonies.

Spatially controlled stem cell differentiation via morphogen gradients: comparing static and dynamic microfluidic platforms

In this study, we have employed lithography techniques to fabricate stretchable metallic micro-wiring with potential applications in flexible and stretchable electronics. The metal is deposited directly on top of the nano-fiber mesh, and it is patterned with photolithographic techniques to demonstrate stretchable micro-wiring.

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Fabrication of Ultra-Thin Suspended ALD Membranes

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Plasma Etching of High Aspect ratio Sapphire Antireflection Nanostructures Using Multilayer Etching Mask

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