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VIDEO DOI: https://doi.org/10.48448/6qjy-v903
PAPER DOI: 10.1109/IRPS48228.2024.10529352
technical paper
Fundamental understanding of NBTI degradation mechanism in IGZO channel devices
keywords:
oxide-field-driven hydrogen release
negative shift
nbti
igzo
NBTI of IGZO TFTs is studied using diverse devices and conditions. Four main characteristics are observed: V th shift is almost independent of V g_stress, and shows a large activation energy and a steep time kinetic, while the relaxation rate decreases with increasing temperatures. Using TCAD and modelling, these peculiar features can be explained by an oxide-field-dominated hydrogen release at gate side of the gate-dielectric, inducing additional doping and the negative V th shift.