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PAPER DOI: 10.1109/IRPS48228.2024.10529457

poster

IRPS 2024 Main Conference

April 17, 2024

Dallas, United States

Measurement of the Dit changes under BTI-stress in 4H-SiC FETs using the subthreshold slope method

The non-ideality in the subthreshold slope can be used to extract interface trap densities Ditvalues. We have applied this method to monitor changes in Dit under BTI stress and compare them to fixed oxide charges with regards to their impact on threshold voltage.

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