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PAPER DOI: 10.1109/IRPS48228.2024.10529495

poster

IRPS 2024 Main Conference

April 17, 2024

Dallas, United States

Side and Corner Region Non-Uniformities in Grown SiO2 and Their Implications on Current, Capacitance and Breakdown Characteristics

This paper addresses the correct analysis of thick-oxide devices that mimic HV periphery devices of 3DNAND. Thick oxides grown close to the STI are found to be thinner at the edges. We introduce a model that divides the oxide into three different regions with different EOTs. This explains the conflicting electrical data and highlights the role of corners on leakage and breakdown. Applying the model to different oxide-growth processes provides guidelines to limit thickness variations.

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