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PAPER DOI: 10.1109/IRPS48228.2024.10529350

poster

IRPS 2024 Main Conference

April 17, 2024

Dallas, United States

Self-Heating Effect of Device-Circuit with Back-side Power Delivery Network beyond 3nm Node

In this work, we explored the self-heating effect (SHE) and performance analysis of Backside Power Delivery Network (BSPDN) technology for routing logical signals from underlying devices to SRAM macros and 3nm technology nodes. A comprehensive evaluation was conducted on the impact of using BSPDN on the thermal effects and performance of circuits in terms of Power, Performance, Area, and Thermal (PPAT) from devices to circuits.

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