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VIDEO DOI: https://doi.org/10.48448/cb3j-wm96

poster

IRPS 2024 Main Conference

April 17, 2024

Dallas, United States

Loadline Dependent Current Filament Dynamics in Nanoscale SCR Devices

Physics of experimentally observed abnormal behavior in STI bounded Silicon-Controlled-Rectifier (SCR) structures is investigated and explained using basic principles and 3D electrothermal TCAD simulations. The SCR device is found to show pulse to pulse instability in the snapback region during 100ns pulse width TLP measurement. The instabilities depended on the load line conditions used in the TLP measurement. The physical insights and device physics has been explored using well calibrated 3D process and device TCAD.

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