Premium content
Access to this content requires a subscription. You must be a premium user to view this content.
Monthly subscription - $9.99Pay per view - $4.99Access through your institutionLogin with Underline account
Need help?
Contact usPAPER DOI: 10.1109/IRPS48228.2024.10529419
technical paper
General statistical model for dielectric breakdown including reverse area scaling – The role of area-dependent dynamic competition
keywords:
general statistical model for dielectric breakdown including reverse area scaling – the role of area-dependent dynamic competition
We successfully developed a statistics-based model, specifically the joint Weibull-Fréchet model, with only four parameters to characterize reverse area-scaling of tBD data in good agreement. This model can be used to subsequently extract parameters in defect generation-annihilation processes implemented in the physics-based model. More importantly, this model can be used for reliability projection from test areas to the ultimate chip area.