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PAPER DOI: 10.1109/IRPS48228.2024.10529419

technical paper

IRPS 2024 Main Conference

April 18, 2024

Dallas, United States

General statistical model for dielectric breakdown including reverse area scaling – The role of area-dependent dynamic competition

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general statistical model for dielectric breakdown including reverse area scaling – the role of area-dependent dynamic competition

We successfully developed a statistics-based model, specifically the joint Weibull-Fréchet model, with only four parameters to characterize reverse area-scaling of tBD data in good agreement. This model can be used to subsequently extract parameters in defect generation-annihilation processes implemented in the physics-based model. More importantly, this model can be used for reliability projection from test areas to the ultimate chip area.

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