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VIDEO DOI: https://doi.org/10.48448/60ty-5272
PAPER DOI: 10.1109/IRPS48228.2024.10529419
technical paper
General statistical model for dielectric breakdown including reverse area scaling – The role of area-dependent dynamic competition
keywords:
general statistical model for dielectric breakdown including reverse area scaling – the role of area-dependent dynamic competition
We successfully developed a statistics-based model, specifically the joint Weibull-Fréchet model, with only four parameters to characterize reverse area-scaling of tBD data in good agreement. This model can be used to subsequently extract parameters in defect generation-annihilation processes implemented in the physics-based model. More importantly, this model can be used for reliability projection from test areas to the ultimate chip area.