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Contact usPAPER DOI: 10.1109/IRPS48228.2024.10529408
technical paper
Experimental Segmentation of Vertical Charge Loss Mechanisms in Charge Trap-Based 3D NAND Arrays
keywords:
storage charge loss
detrapping
charge trap
This work provides a characterization and modeling of the mechanisms responsible for the vertical loss (VL) of charge in charge trap 3D NAND arrays. Contributions of charge detrapping and storage charge loss (SCL) are experimentally separated for the first time. Studying the dependence of SCL activation energy on cycling and programmed level, evidence for the physical mechanisms contributing to it is provided. Finally, a simple yet effective model is devised which reproduces the VL transients.