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PAPER DOI: 10.1109/IRPS48228.2024.10529408

technical paper

IRPS 2024 Main Conference

April 16, 2024

Dallas, United States

Experimental Segmentation of Vertical Charge Loss Mechanisms in Charge Trap-Based 3D NAND Arrays

keywords:

storage charge loss

detrapping

charge trap

This work provides a characterization and modeling of the mechanisms responsible for the vertical loss (VL) of charge in charge trap 3D NAND arrays. Contributions of charge detrapping and storage charge loss (SCL) are experimentally separated for the first time. Studying the dependence of SCL activation energy on cycling and programmed level, evidence for the physical mechanisms contributing to it is provided. Finally, a simple yet effective model is devised which reproduces the VL transients.

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