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PAPER DOI: 10.1109/IRPS48228.2024.10529420

technical paper

IRPS 2024 Main Conference

April 16, 2024

Dallas, United States

Physical Study of Low-frequency TDDB Lifetime Deterioration in Advanced FinFETs

keywords:

dielectric.

tddb

finfet

In this work, we explored the TDDB TTF deterioration under low-frequency of advanced n-FinFETs by analyzing the electrical parameter degradation during the stress. This phenomenon is physically attributable to Maxwell-Wagner instability due to the additional defects generated in IL during the low-frequency AC TDDB stress.

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