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Contact usPAPER DOI: 10.1109/IRPS48228.2024.10529420
technical paper
Physical Study of Low-frequency TDDB Lifetime Deterioration in Advanced FinFETs
keywords:
dielectric.
tddb
finfet
In this work, we explored the TDDB TTF deterioration under low-frequency of advanced n-FinFETs by analyzing the electrical parameter degradation during the stress. This phenomenon is physically attributable to Maxwell-Wagner instability due to the additional defects generated in IL during the low-frequency AC TDDB stress.