Lecture image placeholder

Premium content

Access to this content requires a subscription. You must be a premium user to view this content.

Monthly subscription - $9.99Pay per view - $4.99Access through your institutionLogin with Underline account
Need help?
Contact us
Lecture placeholder background

poster

ICALEO 2023

October 16, 2023

Chicago, United States

Resonant Mirror Based Laser Direct Lithography

keywords:

resonant mirror

laser direct lithography

There has been strong interest in laser direct lithography(LDL) due to flexibility of patterning based on software. However, the conventional LDL has a problem that is too slow compared to mask lithography because it depends on the scanning velocity of laser beam or stages, which causes a decrease in productivity, making it difficult to apply to manufacturing. To overcome these drawbacks, we implemented a resonant mirror based LDL, which is different from the conventional laser scanning method based on a stepper motor. The laser source of the instrument is a laser diode(LD) which has 405 nm wavelength, and the optics are designed to have a beam spot size of less than 20um in the focal plane. We applied this feature to laser scan system and have set 800Hz frequency. It can create a pattern in 1.25us for a line of about 10 mm. Compared to the conventional LDL system using the laser scanning method, the resonant mirror based LDL system has the advantages of being over 80,000 times faster in processing time. The designed LDL system capable of high-speed scanning with uniform physical characteristics is expected to meet the demand for small quantity production of diverse items as well as low operation costs.

Next from ICALEO 2023

Elucidation of Spatter Generation Mechanism in Keyhole Welding of Stainless Steel With 16 kW Disk Laser by In-Situ Observation of Welding Dynamics
poster

Elucidation of Spatter Generation Mechanism in Keyhole Welding of Stainless Steel With 16 kW Disk Laser by In-Situ Observation of Welding Dynamics

ICALEO 2023

+2
Yoshiaki Kurita and 4 other authors

16 October 2023

Stay up to date with the latest Underline news!

Select topic of interest (you can select more than one)

PRESENTATIONS

  • All Lectures
  • For Librarians
  • Resource Center
  • Free Trial
Underline Science, Inc.
1216 Broadway, 2nd Floor, New York, NY 10001, USA

© 2023 Underline - All rights reserved