United States

photolithography

intensive

physics

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AAPT SM21

Modern technology is based on well-developed fabrication techniques. Among these techniques, photolithography is one of the most used in industry and research. Unfortunately, the experiences that undergraduate students can have using these fabrication techniques is still limited. In this sense, I have developed an intensive course that allows students to get experience on the equipment, parameters, and skills that are required to successfully create patterned structures based on photolithography by using easily accessible equipment. Over one semester, the students have gotten structures that can reach dimensions in the order of tens of microns. This intensive opens the opportunity in undergraduate institutions to provide required skills to students that will be part of the upcoming workforce.

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Introduction to microfabrication techniques. An intensive course

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