United States

We present optically resonant bipartite metal nano-cylinder arrays fabricated using electron beam lithography. The arrays utilise two different structure sizes with diameter differences as small as 10 nm. We show that this can be achieved and that the arrays show a resonance response that agrees with electromagnetic simulations.

EIPBN 2021

The Fabrication of Bipartite Plasmonic Arrays for Lasing Applications

laser

surface lattice resonance

electron beam lithography

plasmonics


![](https://assets.underline.io/uploads/markdown_image/1/image/2e10c515564e9ec3287ee4c664011c20.png)

The energy cost of storing and moving data is enormous, and is growing at such a rapid pace that within a few years the power demand may overwhelm some developed nations. Non-volatile memory (NVM) and neuromorphic computing are enabling critical advances in this area, but there are many scientific and technological challenges. This conference will cover the materials challenges of different memory technologies, from the fundamental processes and mechanisms, to industry perspectives on materials specifications and manufacturing.

Materials Challenges for Memory

technical paper

The International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), affectionately known as "3-Beams," is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging technologies; and their applications in a broad spectrum of fields. In its 64th meeting, researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent and future trends in these technologies.
 
 
 
[![](https://assets.underline.io/uploads/markdown_image/1/image/4bdf4450aa93073cd684b096b403df2e.png)](https://drive.google.com/file/d/1CPaA3-Yf7_maBxJMUJaUORLF3HGO9CIe/view?usp=sharing) [![](https://assets.underline.io/uploads/markdown_image/1/image/cea8a407085dee5422a2c16738ce27ca.png)](https://eipbn.org/abstracts/2021/)

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As the thickness of the vibrating structures is reduced, the built-in strain of the structural materials plays an increased role in determining the mechanical performance of the devices. Here we demonstrate the realization of ultrathin doubly clamped nanomechanical resonators with an axial strain in the scale of 10^8.

Approaching the stress-free limit in ultrathin doubly-clamped nanomechanical resonator

Current networks of neurons show a biology, which represents functions similar to those reported for fetal human brain. Human brain modelling on chip can shine light on in vivo-like message passing from neuron to neuron in a dish.

Moonshot: Nanofabricating neural networks

Here, we will show the application of Cryo-FIBID to other precursors beyond W(CO)6, with the aim of obtaining ultrafast growth of metallic deposits, and eventually additional functional properties. In particular, we will discuss the results obtained using the (CH3)3Pt(CpCH3) precursor, which is commonly found in commercial FIB equipment.

Ultrafast growth of metallic deposits by focused ion beam irradiation under cryogenic conditions (Cryo-FIBID)

CMOS back-end-of-line integration is a very promising technology for the next generations of integrated circuits. Yet, electron beam lithography and alignment on multiple underlying metal layers and structures is challenging. In this paper, we present an image correlation strategy, procedure and markers to reach alignment accuracy better than 5 nm.

Comparison of alignment markers and method for electron-beam lithography on CMOS dies

Using high current focused Xe ion beam milling we fabricated ultra-deep and high quality micro-axicons in such a challenging material for microfabrication as lithium niobate. The axicons generate sub-wavelength focused beam over extended depths of focus with potential applications in microscopy and particle trapping.

Ultra-deep micro-axicons in lithium niobate by focused Xe ion beam milling

Our goal in this paper is to demonstrate a process flow for the fabrication of silicon tips using KOH based wet etching and Cryo or Bosch based dry etching approaches.

Fabrication of Silicon Micro Tips for Microbial Cell Lysis Applications

We have developed a new technology for detecting single DNA molecules on-chip. A nanofluidic device was fabricated in a multi-step process to unfold the molecules in 3D inlets and guide them inside the nanochannels. No external field is applied, allowing high throughput and generate enormous data in real-time.

High Throughput DNA Optical Mapping in Real-Time on 3D Nanofluidic Devices

Blood separation and processing is a vital and essential step in numerous medical and clinical tests. We present here a unique deformable nanodevice functionalized by three-dimensional (3D) microbeads for plasma separation and blood cells retrieval.

Deformable Microbeads-stacked Nanodevice for Blood Plasma Separation and Blood Cells Retrieval

Label-free optical observation of transparent nano-objects is challenging. We present PlAsmonic NanO-apeRture lAbel-free iMAging (PANORAMA) to image, size, count and monitor single nanoparticle with a size limit approaching sub-10 nm. Molecular imaging is envisioned with functionalized substrates for single nanoparticle analysis for extracellular vesicles (e.g., exosomes) and pathogens (e.g., viruses).

A new label-free plasmonic imaging technique for quantitative analysis of transparent nanoscale objects approaching molecular size

We develop a broadband and omnidirectional tunable resonators with polarization-free high light absorption by preparing a hexagonally patterned array of free-standing SiO2_Ag core-shell nanoparticles. It is the result of hybrid optical modes consisting of Plasmon modes and whispering gallery modes.

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