United States

A short overview of the mathematical and computational methods used in LER metrology,
with special emphasis on noise effects and machine learning methods as well as a mathematical modelling approach of generating synthesized SEM images in an effort to demonstrate the pixelization effects on LER measurement

EIPBN 2021

Computational Nanometrology in Line Edge Roughness Measurements: Noise and Pixelization Effects

The International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), affectionately known as "3-Beams," is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging technologies; and their applications in a broad spectrum of fields. In its 64th meeting, researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent and future trends in these technologies.
 
 
 
[![](https://s3.eu-west-1.amazonaws.com/underline.prod/uploads/markdown_image/1/image/4bdf4450aa93073cd684b096b403df2e.png)](https://drive.google.com/file/d/1CPaA3-Yf7_maBxJMUJaUORLF3HGO9CIe/view?usp=sharing) [![](https://s3.eu-west-1.amazonaws.com/underline.prod/uploads/markdown_image/1/image/cea8a407085dee5422a2c16738ce27ca.png)](https://eipbn.org/abstracts/2021/)

To register for this event, please follow the link below.

The OWSD General Assembly and international conference will be held entirely online for the first time in OWSD's 28-year history, allowing as many of OWSD's 7600+ members to participate as possible.

The conference theme is 'Women, science and development', exploring three areas of relevance: 1) the importance of basic sciences for development; 2) the impact of applied sciences on development and 3) including sex and gender as variables in scientific research.


**Keynote speakers include:** 
* Fabiola Gianotti, Director-General of CERN; 
* Bina Agarwal, an internationally celebrated economist specializing in the political economy of gender, poverty and inequality; and 
* Angela Saini, award-winning author of Inferior: How Science Got Women Wrong and the New Research That’s Rewriting the Story, Superior: The Return of Race Science, and other books. 

OWSD members will present their own research in the three themes during poster sessions throughout the conference. In addition, members will also present their own scientific and personal responses to the COVID-19 pandemic. All members will also have the opportunity to take part in a workshop on increasing their visibility and impact as a scientist, with a session on using podcasts for storytelling by Joy Owango and Adelle Onyango of the Training Centre in Communication (TCC Africa), followed by a session on filmmaking for impact by Nicole Leghissa, OWSD video consultant.

The conference will include a handover of the previous OWSD Executive Board to the new members, elected in June-July 2021. On the last day of the conference (19 November), the OWSD Italy Country Network will be launched. **This will be an in-person event in Trieste.** Italian government representatives and donors are invited to attend. The Trieste event will be coordinated with similar in person events being held in OWSD countries throughout the developing world and streamed online. At least 2,000 OWSD members, women scientists from developing countries around the world, are expected to participate online in the General Assembly and conference.

 

**ABOUT THE PROGRAMME**

In order to approach the complex and wide-ranging challenges of the 2030 Agenda for Sustainable Development, societies around the world must access and harness all the talent and experience available to them. The concerns and perceptions of the greatest number of all possible actors and recipients must be considered in order that the most relevant issues and effective solutions are found. Women are considerably underrepresented as researchers in STEM subjects around the globe; according to UNESCO Institute of Statistics (UIS) data, in 2019 the global average percentage of women researchers was still below 30%. Yet women typically have first hand specialist knowledge of the day-to-day challenges diverse individuals face within communities, and can be key informers in the design and development of their solutions. Moreover, since women are most often the providers of informal community support, if they are not fully informed—and if solutions are developed without their consultation—it may be the case that products, services and solutions are not relevant or appropriate. Technological advances may mean improved machines on large farms, for example, potentially increasing food production, but since the key points of food insecurity in the world are on small-scale farms managed by women throughout the Global South, such capital investments will have little impact in the areas where food production is most critical—and where women’s knowledgeable implementation of appropriate innovative technologies could make the most difference.

 
 


**Keynote Speakers:**
* Fabiola Gianotti, Director-General of CERN; 
* Bina Agarwal, an internationally celebrated economist specializing in the political economy of gender, poverty and inequality; and 
* Angela Saini, award-winning author of Inferior: How Science Got Women Wrong and the New Research That’s Rewriting the Story, Superior: The Return of Race Science, and other books. 

**Eminent Guests:**
* Elena Bonetti, Italian Minister for Family and Equal Opportunities
* Maria Cristina Messa,	Italian Minister of Universities and Research
* Shamila Nair-Bedouelle,	Assistant Director General for Natural Sciences, UNESCO
* Maria Chiara Carrozza,	President, National Research Council of Italy
* Kerstin Jonsson Cisse,	Head of Unit for Globally Sustainable Economic Development, Sida - Sweden
* Naser Faruqui,	Director of Education and Science at IDRC - Canada
* Ylann Schemm,	Director, Elsevier Foundation
* Alberto Quadrio Curzio,	President Emeritus of the Italian Academy of Sciences and Humanities 
* Mohamed Hassan,	President, TWAS the World Academy of Sciences

**Chairs, panelists, interviewers and other speakers:**
Jennifer Thomson, Tonya Blowers, Rana Dajani, Shobhana Narasimhan, Joy Owango, Elizabeth Pollitzer, Kausila Timsina, Elizabeth Bandason, Susana Arrechea, Reinabelle Reyes, Dorine Odongo, Elizabeth Pollitzer, Adelle Onyango, Nicole Leghissa, Jana Rodriguez Hertz, Maryse Nkoua Ngavouka, Kate Shaw, Chao Mbogo, Prativa Pandey, Edna Patricia Matta-Camacho, Amira Shaheen, Wezi Nyambili, Ana Lucía Martinez Abarca, Mashura Shammi, Therese Umuhoza, Dionica Gamboa, Marian Nkansah, Babalola Olubukola Oluranti, Esi Awuah, Fortunate Farirai, Atya Kapley, Hasin Anupama Azhari, Huda Basaleem, Nashwa Eassa, Shymaa Enany, Kleinsy Bonilla, Patricia Castillo-Briceno, Fang Xin

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OWSD 6th GENERAL ASSEMBLY AND INTERNATIONAL CONFERENCE

OWSD, the Organization for Women in Science for the Developing World, announces its 6th General Assembly and International Conference, which will be held from November 8-19, 2021. The conference theme is **'Women, science and development'**, exploring three areas of relevance: 1) the importance of basic sciences for development; 2) the impact of applied sciences on development and 3) including sex and gender as variables in scientific research.

technical paper

We present 3D printed Hybrid metasurfaces that employ variable height (3D) phase plates, pillars, and holes that provide additional degrees of freedom beyond purely planar designs. These structures were 3D printed with two-photon lithography technique.

Hybrid Metasurface Fabrication Using Two-photon Lithography

Molybdenum disulfide, as  a transition metal dichalcogenide, has attracted huge attention for its good optical properties. However, to produce corresponding arrays of nano/microscale devices, resist-based lithography and etching generate permanent contaminations and damages. Here, we report a  method capable of generating arbitrary MoS2 patterns without additional lithography or etching processes.

Multiplexing Rubbing-Induced Site-Selective (RISS) Method for Manufacturing MoS2 Device Arrays

In this work, we study the photo-response properties (e.g., photoresponsivity and noise equivalent power (NEP)) of in-plane MoS2 photodetectors as the function of their geometric dimensions (e.g., thickness, length, and width of photoactive layers) and fabrication conditions (e.g., doping, etching, and substrate choice).

Fabrication optimization of the photo-response characteristics of MoS2 photodetectors for biosensing applications

CVD graphene has brought interest from the biosensors community. Previous work in our group demonstrated a unique fabrication protocol for graphene solution gated field effect transistor (SGFET). This study presents the electrochemical characterization and first biological detection campaign (using aptmamers as probe for hormone detection) of our SGFET sensors.

Electrochemical characterization of graphene gated field effect transistors: route for smart biological sensors

We have developed PHIDL, an open-source GDSII-based CAD tool for Python. PHIDL allows intuitive-but-powerful generation of geometries and has a large library of premade geometry functions ready for use, including basic shapes, text, lithographic test structures, boolean operations, placement and automatic packing algorithms, superconducting nanowires, and photonic routing.

HIDL: Intuitive GDS layout and CAD geometry creation for Python

Ultrahigh aspect-ratio structures are important for x-ray optics, energy storage, and sensors. Atomic layer deposition with nucleation and growth enhancement was developed to coat nanoporous silicon microstructures with aspect ratios up to 500:1, an order of magnitude higher than before. Devices prepared with these structures provide integrated on-chip energy storage.

Ultrahigh Aspect Ratio Silicon Nanoporous Microstructures Coated Using ALD with Nucleation Enhancement for Energy Storage and Other Applications

Virtual metrology refers to methods that employ manufacturing process related data and relevant sensor readings to predict properties of the product. The initial results examining the end-point detection of a single RIE step indicate that the approach is viable and performs better compared with traditional feature identification by user experience.

VM Modeling of Reactive Ion Etching Based on Statistics-Based and Dynamics-Inspired Spectral Features

Top-down image analysis of hexagonal hole arrays created in silicon using block-copolymer nanolithography was used to evaluate differences in dry etch rate between n-type, p-type, and intrinsic silicon.  By analyzing the hole areas and extracting the average radius and porosity, sub-nm differences in chemical etch rate could be extracted.

Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution

This study focuses on understanding the fundamental limitations of PMMA exposure to EUV that leads to LER and printing failures. We study the photon-PMMA interactions in EUV using dissolution rate as an indicator of exposure induced change in molecular weights. Consequently, we calculated number of reactions per photon absorbed.

Understanding the fundamental limitations of PMMA resist for EUV exposures based on dissolution rate variations through EUV dose

We use focused ion beams to create specific defects on suspended 2D materials (graphene, MoS2, WSe2). We study the extent to which the defects act as nucleation sites for Au, and tune deposition conditions and surface cleanliness to facilitate self-assembly of specific nanoisland shapes.

Computational Nanometrology in Line Edge Roughness Measurements: Noise and Pixelization Effects

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