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IRPS 2026 Main Conference & YIR

•

March 26, 2026

•

Tucson, United States

Electromigration is a key reliability issue in VLSI interconnects, where copper is being replaced by tungsten silicide (W-Si) and ruthenium (Ru). Experiments show EM-induced voids in W-Si and Ru at sites opposite conventional electron wind force predictions, sparking hypotheses of hole-dominated transport and p-metal behavior. This work provides a consistent explanation using density functional theory with atomic flux divergence analysis, demonstrating that hydrostatic stress gradient force dominates void formation, independent of effective charge number (Z*).

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Assessment of critical Co electromigration parameters
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