Process Reward Models (PRMs) have emerged as a promising solution to address the reasoning mistakes of large language models (LLMs). However, existing PRMs typically output evaluation scores directly, limiting both learning efficiency and evaluation accuracy, which is further exacerbated by the scarcity of annotated data. To address these issues, we propose Reasoning-Driven Process Reward Modeling (R-PRM), which leverages the reasoning ability to improve process-level evaluation. First, we leverage stronger LLMs to generate seed data from limited annotations, effectively activating reasoning capabilities and enabling comprehensive step-by-step evaluation. Second, we explore self-improvement of our PRM through preference optimization, without requiring additional annotated data. Third, we introduce inference-time scaling to fully harness our model's reasoning potential. Extensive experiments demonstrate R-PRM's effectiveness: on ProcessBench and PRMBench, it surpasses strong baselines by 13.9 and 8.5 F1 scores. When applied to guide mathematical reasoning, R-PRM achieves consistent accuracy improvements of over 8.6 points across six challenging datasets. Further analysis reveals that R-PRM exhibits more comprehensive evaluation and robust generalization capabilities, thereby highlighting significant potential.