keywords:
backside power delivery
die-level faults
eotpr
Since its initial inception, Electro-Optical TeraHertz Pulsed Reflectometry (EOTPR) has become a critical tool in failure analysis (FA) labs 1. This is mainly thanks to its rapid measurement time, high fault localization accuracy and non-destructive nature 2-6. EOTPR utilizes a femto-second laser to generate a high-frequency electrical pulse, which is injected into a trace in a Device-Under-Test (DUT) by means of a high frequency probe and a manual or semi-automatic probing station.