FROMANNUAL REVIEWS

IRPS 2025 Main Conference

•

April 02, 2025

•

Monterey, United States

keywords:

backside power delivery

die-level faults

eotpr

Since its initial inception, Electro-Optical TeraHertz Pulsed Reflectometry (EOTPR) has become a critical tool in failure analysis (FA) labs 1. This is mainly thanks to its rapid measurement time, high fault localization accuracy and non-destructive nature 2-6. EOTPR utilizes a femto-second laser to generate a high-frequency electrical pulse, which is injected into a trace in a Device-Under-Test (DUT) by means of a high frequency probe and a manual or semi-automatic probing station.

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