As the thickness of the vibrating structures is reduced, the built-in strain of the structural materials plays an increased role in determining the mechanical performance of the devices. Here we demonstrate the realization of ultrathin doubly clamped nanomechanical resonators with an axial strain in the scale of 10^8.

Approaching the stress-free limit in ultrathin doubly-clamped nanomechanical resonator

**Session Chair:**
 David Czaplewski and Mark McLean
 
 
MEMS-Based Scanning Tunneling Microscopy

**Speakers:**
 Afshin Alipour, S. O. Reza Moheimani, James Owen, William Owen, Ehud Fuchs and John Randall

Transmissive Microshutter Arrays

**Speaker:**
 Li Jiang

Approaching the stress-free limit in ultrathin doubly-clamped nanomechanical resonator

**Speakers:**
 Jian Zhou, Nicolaie Moldovan, Liliana Stan, Haogang Cai, David Czaplewski and Daniel López

Electron wave front modulation in (S)TEM with patterned mirrors

**Speakers:**
 Maurice Krielaart and Pieter Kruit

Sessions 5A Q&A - Micro and Nanoscale Mechanical Devices II

technical paper

The International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), affectionately known as "3-Beams," is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging technologies; and their applications in a broad spectrum of fields. In its 64th meeting, researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent and future trends in these technologies.
 
 
 
[![](https://assets.underline.io/uploads/markdown_image/1/image/4bdf4450aa93073cd684b096b403df2e.png)](https://drive.google.com/file/d/1CPaA3-Yf7_maBxJMUJaUORLF3HGO9CIe/view?usp=sharing) [![](https://assets.underline.io/uploads/markdown_image/1/image/cea8a407085dee5422a2c16738ce27ca.png)](https://eipbn.org/abstracts/2021/)

Liliana Stan

1

Presentations

Approaching the stress-free limit in ultrathin doubly-clamped nanomechanical resonator

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