We present nanoscale, resonator-based piezoelectric/magnetostrictive magnetometers that operate on the delta-E effect and are capable of detecting weak magnetic fields at low frequency or DC. As these devices are just hundreds of nanometers thick, and on the order of a hundred microns laterally, they can be produced by lithographic microfabrication techniques. This results in sensors that offer high portability, low cost, low power consumption, and the potential for high spatial resolution in magnetic sensor arrays. However, no prior study exists of a systematic examination of the properties that affect sensing performance in such magnetic sensors. Here, we report on how the deformation of the resonator plate, quantified as curvature, affects the total frequency response of these delta-E effect-based magnetometers. It was found that frequency response changed by as much as two orders of magnitude based on this parameter in devices that are otherwise identical and fabricated on the same Si wafer. Ultimately, a sensor with low curvature was fabricated and a record-high sensitivity to DC magnetic fields, of 4.98 Hz/nT, was achieved. To study this phenomenon in more detail, we measured the Q factor, imaged the magnetic domains using the magneto-optical Kerr effect (MOKE), and performed simulations to shed light on the internal stress distribution. From the Q factor data, we observed a loss mechanism dominated by magnetic loss. Informed by the MOKE images and simulation results, we then tested a simple magnetic model with fitting parameters of active volume fraction, mean easy axis, and effective anisotropy energy density. The model was found to fit the data quite well with low volume fraction but a large easy axis tilt and anisotropy energy.

Curvature Effects on Magnetic Field Sensitivity of Magnetoelectric Nano-Plate Resonators

F3: Novel Sensors I

technical paper

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Alexei Matyushov

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Curvature Effects on Magnetic Field Sensitivity of Magnetoelectric Nano-Plate Resonators

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