Label-free optical biosensors using nanotechnologies have made substantial progress in the last few years due to their ability for fast, compact, and cost-effective chemical detection devices [1]. High refractive index dielectric nanoresonators [2] have been found as promised candidates for the miniaturization of sensitive bio-sensing devices thanks to their low dissipative losses [3]. Integrated on-chip, such sensors allow instant monitoring of the concentration of target analytes, which becomes a necessary tool for many life sciences fields [4]. In this work, silicon nanoantennas arranged in a one- dimensional array are fabricated to produce a high-quality factor resonator (7500 measured experimentally) with high-sensitivity to optical modulation [5], allowing precise refractive index sensing of the surrounding medium. Here, the measurements for several glycerin dilutions in aqueous solutions show a high sensitivity of 265 nm/RIU and the highest figure of merit of 1400 RIU-1. With a small sensing area of 0.5×18.2 μm2, we believe this sensor design is an attractive candidate to realize lab- on-chip sensor arrays for label-free multiplexing in a cost-effective way due to the CMOS photolithography fabrication compatibility.

References
1. E. Luan, H. Shoman, D. Ratner, K. Cheung and L. Chrostowski, Sensors, 2018, 18, 3519.
2. A. I. Kuznetsov, A. E. Miroshnichenko, Y. H. Fu, J. Zhang and B. Luk’Yanchuk, Scientific
reports, 2012, 2, 492.
3. O. Yavas, M. Svedendahl and R. Quidant, ACS nano, 2019, 13, 4582-4588.
4. G. P. Hancke and G. P. Hancke Jr, Sensors, 2013, 13, 393-425.
5. L. Ding, D. Morits, R. Bakker, S. Li, D. Eschimese, S. Zhu, Y. F. Yu, R. Paniagua-
Dominguez and A. I. Kuznetsov, ACS Photonics, 2020, 7, 1001-1008.

One-dimensional high Q nanoparticle chain resonator for refractive index sensing

**Session Chair: **Cesare Soci

SYM H - Photonic Metamaterials & Metasurfaces I/Photonic Applications I

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One-dimensional high Q nanoparticle chain resonator for refractive index sensing

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