Perrine Batude received the M.S degree in physics and engineering from Grenoble INP. During her Ph.D. obtained in 2009, she began the early development of 3D sequential integration in Leti. She joined LETI in 2009 as a device engineer in the Electronics Nanodevices Laboratory. She is author or co-author of more than 100 papers published in conferences and journals. She has been member of the IEDM conference committee for Process manufacturing. Current research interest of Dr. Perrine Batude includes also fully depleted device processing, low temperature processes and cointegration of heterogeneous devices in 3D integration.