**Please read the paper on the following link:**

https://ieeexplore.ieee.org/document/9186848

**Abstract:**

To enable CMOS compatible GaN HEMTs for the next generation of communication systems (5G and beyond), a low gate resistance is of great importance since it directly affects the RF power gain and fMAX of the transistor. In this paper, the impact of various gate-metal stacks on the gate resistance and RF performance of the devices is studied. The optimized Ti-free gatemetal process leads to fMAX enhancement up to ~ 50% for devices scaled down to 0.32μm gate lengths. The gate resistance for the Tshaped gate is modelled from S-parameters and validated on various gate field plate geometries. The tradeoff between the gate resistance and parasitic capacitance in GaN HEMTs is highlighted in this case.

Analysis of Gate Metal Resistance in CMOS Compatible RF GaN HEMTs

**Session Chairs:** David Ruffieux, CSEM SA; Jean-Pierre Raskin, Université catholique de Louvain

D3L-3: Substrates & Design Techniques for RF/mmW Applications (JOINT 2020 TEDbrief special edition & SSC-L special edition)

technical paper

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ESSCIRC ESSDERC 2021

The aim of ESSCIRC and ESSDERC is to provide an annual European forum for the presentation and discussion of recent advances in solid-state devices and circuits.
The level of integration for system-on-chip design is rapidly increasing.

This is made available by advances in semiconductor technology. Therefore, more than ever before, a deeper interaction among technologists, device experts, IC designers, and system designers is necessary. ESSCIRC and ESSDERC are governed by a common Steering Committee and share Plenary Keynote Presentations and Joint Sessions bridging both device and circuit communities.





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Analysis of Gate Metal Resistance in CMOS Compatible RF GaN HEMTs

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