We use focused ion beams to create specific defects on suspended 2D materials (graphene, MoS2, WSe2). We study the extent to which the defects act as nucleation sites for Au, and tune deposition conditions and surface cleanliness to facilitate self-assembly of specific nanoisland shapes.

Focused Ion Beam Patterning for Defect-Mediated Nucleation on 2D van der Waals Materials

**Session Chairs:**
 Amit Agrawal and Chi-Chun (Charlie) Liu

Sessions 4C Q&A - Imaging, Modeling and Characterization

technical paper

The International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), affectionately known as "3-Beams," is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging technologies; and their applications in a broad spectrum of fields. In its 64th meeting, researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent and future trends in these technologies.
 
 
 
[![](https://assets.underline.io/uploads/markdown_image/1/image/4bdf4450aa93073cd684b096b403df2e.png)](https://drive.google.com/file/d/1CPaA3-Yf7_maBxJMUJaUORLF3HGO9CIe/view?usp=sharing) [![](https://assets.underline.io/uploads/markdown_image/1/image/cea8a407085dee5422a2c16738ce27ca.png)](https://eipbn.org/abstracts/2021/)

Vera Zarubin

1

SHORT BIO

Presentations

Focused Ion Beam Patterning for Defect-Mediated Nucleation on 2D van der Waals Materials

Stay up to date with the latest Underline news!

PRESENTATIONS

CONFERENCES

COMPANY

RESOURCES