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Contact usPAPER DOI: 10.1109/IRPS48228.2024.10529401
technical paper
Device Design and Reliability of GAA MBCFET
keywords:
mbcfet
gaa
device
reliability
Compared to FinFET, MBCFET has significant structural differences such as nanosheet channel with variable width and dielectric spacer between inner gate and highly doped diffusion region. Nanosheet width and spacer architecture play a crucial role in device performance and enable the design of devices with different advantages and disadvantages. We overview the impact of MBCFET 's unique structures on device characteristics and also analyze the reliability impact of MBCFET's unique structures.