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PAPER DOI: 10.1109/IRPS48228.2024.10529401

technical paper

IRPS 2024 Main Conference

April 17, 2024

Dallas, United States

Device Design and Reliability of GAA MBCFET

keywords:

mbcfet

gaa

device

reliability

Compared to FinFET, MBCFET has significant structural differences such as nanosheet channel with variable width and dielectric spacer between inner gate and highly doped diffusion region. Nanosheet width and spacer architecture play a crucial role in device performance and enable the design of devices with different advantages and disadvantages. We overview the impact of MBCFET 's unique structures on device characteristics and also analyze the reliability impact of MBCFET's unique structures. 

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