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Contact usVIDEO DOI: https://doi.org/10.48448/1647-ef17
PAPER DOI: 10.1109/IRPS48228.2024.10529390
technical paper
Reliability Assessment of a-IGZO and ZnO Thin Film Transistors (TFTs) to X-ray irradiation
keywords:
xps.
xray irradiation
thin film transistors
oxide semiconductors
reliability
This report evaluates total ionizing dose degradation characteristics of ZnO and IGZO TFTs after x-ray irradiation. To fully understand the effect of the radiation on the two types of TFTs, we evaluated the structural, morphological, and binding states of the metal-oxide-semiconductor layers before and after X-ray irradiation.