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VIDEO DOI: https://doi.org/10.48448/1647-ef17
PAPER DOI: 10.1109/IRPS48228.2024.10529390

technical paper

IRPS 2024 Main Conference

April 18, 2024

Dallas, United States

Reliability Assessment of a-IGZO and ZnO Thin Film Transistors (TFTs) to X-ray irradiation

keywords:

xps.

xray irradiation

thin film transistors

oxide semiconductors

reliability

This report evaluates total ionizing dose degradation characteristics of ZnO and IGZO TFTs after x-ray irradiation. To fully understand the effect of the radiation on the two types of TFTs, we evaluated the structural, morphological, and binding states of the metal-oxide-semiconductor layers before and after X-ray irradiation.

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