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PAPER DOI: 10.1109/IRPS48228.2024.10529362

technical paper

IRPS 2024 Main Conference

April 17, 2024

Dallas, United States

New Insights into the Random Telegraph Noise (RTN) in FinFETs at Cryogenic Temperature

keywords:

finfets

cryogenics

random telegraph noise

RTN in FinFET at cryogenic temperature is charaterized and RTN caused by traps near Metal/HfO2 interface interacting with gate can be observed, which is often overwhelmed by background noise at room temperature. Combining TCAD, the trap location can be determined. Furthermore, full quantumcalculations and compact modeling considering band tail states and interface trap states are conducted to obtain accurate trap parameters. The results reveal a remarkable variety of traps at cryogenic temperature.

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