Premium content
Access to this content requires a subscription. You must be a premium user to view this content.
Monthly subscription - $9.99Pay per view - $4.99Access through your institutionLogin with Underline account
Need help?
Contact usPAPER DOI: 10.1109/IRPS48228.2024.10529362
technical paper
New Insights into the Random Telegraph Noise (RTN) in FinFETs at Cryogenic Temperature
keywords:
finfets
cryogenics
random telegraph noise
RTN in FinFET at cryogenic temperature is charaterized and RTN caused by traps near Metal/HfO2 interface interacting with gate can be observed, which is often overwhelmed by background noise at room temperature. Combining TCAD, the trap location can be determined. Furthermore, full quantumcalculations and compact modeling considering band tail states and interface trap states are conducted to obtain accurate trap parameters. The results reveal a remarkable variety of traps at cryogenic temperature.