Lecture image placeholder

Premium content

Access to this content requires a subscription. You must be a premium user to view this content.

Monthly subscription - $9.99Pay per view - $4.99Access through your institutionLogin with Underline account
Need help?
Contact us
Lecture placeholder background
PAPER DOI: 10.1109/IRPS48228.2024.10529432

technical paper

IRPS 2024 Main Conference

April 17, 2024

Dallas, United States

Light-assisted investigation of the role of oxygen flow during IGZO deposition on deep subgap states and their evolution under PBTI

keywords:

subgap dos

pbti

igzo

We study oxygen flow role during IGZO PVD process on high temperature PBTI in back-gated TFTs by combining light-assisted with electrical stress measurements. Oxygen flow is observed to affect the magnitude of charge trapping and hydrogen related channel doping during PBTI. We show a correlation between sub-gap DOS and oxygen flow during deposition: the larger the oxygen flow, the smaller the light response at time-zero and its increase during PBTI, despite a larger negative DVth. 

Downloads

SlidesPaperTranscript English (automatic)

Next from IRPS 2024 Main Conference

Thermal considerations on RF reliability and aging in SOI CMOS based Power Amplifiers
technical paper

Thermal considerations on RF reliability and aging in SOI CMOS based Power Amplifiers

IRPS 2024 Main Conference

+6Purushothaman Srinivasan
Purushothaman Srinivasan and 8 other authors

17 April 2024

Stay up to date with the latest Underline news!

Select topic of interest (you can select more than one)

PRESENTATIONS

  • All Lectures
  • For Librarians
  • Resource Center
  • Free Trial
Underline Science, Inc.
1216 Broadway, 2nd Floor, New York, NY 10001, USA

© 2023 Underline - All rights reserved