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VIDEO DOI: https://doi.org/10.48448/gas0-e214
PAPER DOI: 10.1109/IRPS48228.2024.10529432

technical paper

IRPS 2024 Main Conference

April 17, 2024

Dallas, United States

Light-assisted investigation of the role of oxygen flow during IGZO deposition on deep subgap states and their evolution under PBTI

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