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Contact usPAPER DOI: 10.1109/IRPS48228.2024.10529432
technical paper
Light-assisted investigation of the role of oxygen flow during IGZO deposition on deep subgap states and their evolution under PBTI
keywords:
subgap dos
pbti
igzo
We study oxygen flow role during IGZO PVD process on high temperature PBTI in back-gated TFTs by combining light-assisted with electrical stress measurements. Oxygen flow is observed to affect the magnitude of charge trapping and hydrogen related channel doping during PBTI. We show a correlation between sub-gap DOS and oxygen flow during deposition: the larger the oxygen flow, the smaller the light response at time-zero and its increase during PBTI, despite a larger negative DVth.