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Contact usPAPER DOI: 10.1109/IRPS48228.2024.10529487
technical paper
Exploring the border traps near the SiO2-SiC interface using low frequency conductance measurements
keywords:
conductance measurement
border traps
mos capacitor
interface trap
silicon carbide
We have performed high resolution conductance measurements in a wide range of frequency from 1 Hz-10 MHz on thermally oxidized and NO annealed MOS capacitors. We identified the energetic position of fast and slow border traps with respect to EC of SiC and estimated the σc and their location in the oxide. In the final paper, we will provide a comparative analysis of border traps across a range of samples, with distinct annealing treatments.