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PAPER DOI: 10.1109/IRPS48228.2024.10529487

technical paper

IRPS 2024 Main Conference

April 16, 2024

Dallas, United States

Exploring the border traps near the SiO2-SiC interface using low frequency conductance measurements

keywords:

conductance measurement

border traps

mos capacitor

interface trap

silicon carbide

We have performed high resolution conductance measurements in a wide range of frequency from 1 Hz-10 MHz on thermally oxidized and NO annealed MOS capacitors. We identified the energetic position of fast and slow border traps with respect to EC of SiC and estimated the σc and their location in the oxide. In the final paper, we will provide a comparative analysis of border traps across a range of samples, with distinct annealing treatments.

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