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technical paper
Fin geometry Multiferroic BiFeO3/CoFe2O4 Nanocomposites formed by templated self
Two-phase self-assembled epitaxial multiferroics are formed by co-deposition of BiFeO3(BFO) and CoFe2O3(CFO) on a SrTiO3(STO) substrate,in which the ferroelectric and ferrimagnetic phases are coupled elastically via their vertical interfaces yielding a magnetoelectric response. By templating the self-assembly,the locations of the BFO and CFO can be controlled, increasing the utility of the nanocomposite and simplifies modeling.Here,we make use of ion-matter interaction as a nucleation site to control the growth of two phases,enabling complex geometries including nano-fins and nano-dots, and extending the templating process beyond the use of 001-STO substrates.In order to counter the charging of insulating substrates (STO) during FIB patterning, a Au layer is deposited on the substrate (step2).After FIB patterning,due to ion implantation,the patterned area is expanded locally (step3,red bump) then the substrate is immersed in Au etchant and HCl, leaving patterned nanoscale trenches or dots on the surface (step4). Post annealing at 850C for 10min is used to recover the atomic flatness of the substrate surface (step5).Then a seed layer of CFO is grown on the patterned substrate(step5),followed by BFO and CFO co-deposition (step6) by pulsed laser deposition.At 700C growth temperature,the maximum diffusion length of CFO is around 200 nm defining the upper range of pattern period.The final morphology is controlled by the processing and growth parameters,including the shape, depth and width of the patterned features and the relative ratio of BFO to CFO.A conductive oxide underlayer of SRO or LSMO is used to enable mapping of the ferroelectric response.This approach was used to form fins of alternating CFO and BFO. Figure2 (top) shows the SEM morphology of the BFO/CFO composite (step 6), in which the BFO and CFO are well separated, achieving ferroelectric/ferrimagnetic nano fins with dimensions: width <100nm; length >5um. A cross-section STEM HADDF image of the nano-fins is presented in Figure 2 (bottom): the two phases are clearly defined and exhibit different heights (BFO~30 nm;CFO~15 nm). The magnetic and ferroelectric domain patterns mapped by magnetic force microscopy and piezoresponse force microscopy will be described.