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technical paper

EIPBN 2021

June 02, 2021

United States

VM Modeling of Reactive Ion Etching Based on Statistics-Based and Dynamics-Inspired Spectral Features

DOI: 10.48448/pa6h-2c11

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Hybrid structures achieved by direct writing laser lithography - tuning the contrast and surface topography of grayscale photoresist with nanoimprint lithography

EIPBN 2021

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Jan Nico Erjawetz and 3 other authors

02 June 2021

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