United States

optical emission spectroscopy

reactive ion etching

virtual metrology

The International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), affectionately known as "3-Beams," is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging technologies; and their applications in a broad spectrum of fields. In its 64th meeting, researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent and future trends in these technologies.
 
 
 
[![](https://s3.eu-west-1.amazonaws.com/underline.prod/uploads/markdown_image/1/image/4bdf4450aa93073cd684b096b403df2e.png)](https://drive.google.com/file/d/1CPaA3-Yf7_maBxJMUJaUORLF3HGO9CIe/view?usp=sharing) [![](https://s3.eu-west-1.amazonaws.com/underline.prod/uploads/markdown_image/1/image/cea8a407085dee5422a2c16738ce27ca.png)](https://eipbn.org/abstracts/2021/)

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EIPBN 2021

Virtual metrology refers to methods that employ manufacturing process related data and relevant sensor readings to predict properties of the product. The initial results examining the end-point detection of a single RIE step indicate that the approach is viable and performs better compared with traditional feature identification by user experience.

VM Modeling of Reactive Ion Etching Based on Statistics-Based and Dynamics-Inspired Spectral Features

technical paper

Hybrid structures achieved by direct writing laser lithography - tuning the contrast and surface topography of grayscale photoresist with nanoimprint lithography

Nanostructured Colors from Colorless Materials

Hybrid 2D & 3D Lithography

Achromatic and Varifocal Metalens Doublet Fabrication by Two-photon Lithography

Hybrid Metasurface Fabrication Using Two-photon Lithography

Multiplexing Rubbing-Induced Site-Selective (RISS) Method for Manufacturing MoS2 Device Arrays

Fabrication optimization of the photo-response characteristics of MoS2 photodetectors for biosensing applications

Electrochemical characterization of graphene gated field effect transistors: route for smart biological sensors

HIDL: Intuitive GDS layout and CAD geometry creation for Python

Ultrahigh Aspect Ratio Silicon Nanoporous Microstructures Coated Using ALD with Nucleation Enhancement for Energy Storage and Other Applications

invited talk

https://d3smihljt9218e.cloudfront.net/transcript/12789/subtitle/fdabb4eb7f1360c4b3e3f88b87e9febb.vtt

English (automatic)

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VM Modeling of Reactive Ion Etching Based on Statistics-Based and Dynamics-Inspired Spectral Features

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Hybrid structures achieved by direct writing laser lithography - tuning the contrast and surface topography of grayscale photoresist with nanoimprint lithography