Premium content

You must be a premium user to view this content. Individual subscription to the premium content will be released soon!

technical paper

EIPBN 2021

June 02, 2021

United States

VM Modeling of Reactive Ion Etching Based on Statistics-Based and Dynamics-Inspired Spectral Features

DOI: 10.48448/pa6h-2c11

Please log in to leave a comment



Next from EIPBN 2021

technical paper

Hybrid structures achieved by direct writing laser lithography - tuning the contrast and surface topography of grayscale photoresist with nanoimprint lithography

EIPBN 2021

Jan Nico Erjawetz and 3 other authors

02 June 2021


  • Home
  • Events
  • Video Library



Underline Science, Inc.
1216 Broadway, 2nd Floor, New York, NY 10001, USA

© 2020 Underline - All rights reserved

Made with ❤️ in New York City