Kun-Chieh Chien
The University of Texas at Austin, Mechanical Engineering, Austin, TX, USA
virtual metrology
reactive ion etching
optical emission spectroscopy
1
presentations
SHORT BIO
Kun-Chieh Chien is the second year Ph.D. student at UT Austin. His research focuses on nanometrology, process monitoring, and data analysis. Before he joined UT Austin, he was a laser process engineer and product manager for several years.
Presentations
VM Modeling of Reactive Ion Etching Based on Statistics-Based and Dynamics-Inspired Spectral Features
Chih-Hao Chang and 2 other authors