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VM Modeling of Reactive Ion Etching Based on Statistics-Based and Dynamics-Inspired Spectral Features
technical paper

VM Modeling of Reactive Ion Etching Based on Statistics-Based and Dynamics-Inspired Spectral Features

EIPBN 2021

Dragan DjurdjanovicKun-Chieh ChienChih-Hao Chang
Chih-Hao Chang and 2 other authors

02 June 2021

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